High sensitivity, high resolution surface photovoltage spectroscopy (SPS) measurement instrument for advanced material research and development and QA/QC inspection.
Sensitivity: μV sensitivity and more than 7 orders of magnitude signal height resolutionMeasurement speed: < 5 minutes per point for a 150 mm wafer with 1 mm resolutionTime resolution: 10 ns up to 100 msOptical head: laser driven light source with adjustable intensity and wavelength output between 200 and 3000 nm light. Spectral width < 10 nm.Reliability: Bench top instrument with build in monochromator for high reliability and uptime > 99%
Pulse width and height modulation
Integrated heating stage (20–250 °C)
Spot size variation
Bias light
Resistivity measurement (wafers)
Reference wafer (Si)
The HR-SPS product with a variable energy excitation source is designed on the same basis as the HR-SPS product with fixed excitation sources. It is a compact bench top contactless electrical characterization tool for offline production control or R&D, measuring the surface photovoltage (SPV) of a sample over a wide injection range in steady state or short pulse excitation and in a continuous sweep over a wide range of wavelengths. This enables true spectroscopy measurements of any photoactive sample to be made in a reliable way. Automated sample recognition and parameter setup allows an easy adaption to a large variety of different samples comprising epitaxial layers and wafers after various processing steps ranging from as-grown material to finished device.
HR-SPS with fixed energy excitation sources
MDpicts
MDPlinescan
MDPmap
MDPpro
