HR-SPS with fixed energy excitation sources

High sensitivity, high resolution surface photovoltage (SPV) measurement instrument with up to 4 excitation energies

for QA/QC inspection of production material and advanced material research and development

Features of HP-SPS fixed

Sensitivity: sub-mV sensitivity and more than 3 orders of magnitude signal height resolution
Measurement speed: < 5 minutes for a 150 mm wafer with 1 mm resolution
Time resolution: 10 ns up to 100 ms
Optical head: Up to 4 light sources integrated into the optical head or fixture for mounting of external lasers – build-in suppression of stray light
Reliability: modular and compact bench top instrument for high reliability and uptime > 99%

Configuration options

Wide range of laser light sources from 337 nm up to 1550 nm
Integrated heating stage (20-250°C)
Spot size variation
Bias light
Resistivity measurement (wafers)
Reference wafer (Si)

Flexible mapping tool for R&D or production monitoring

The HR-SPS product platform is designed on the same basis as the popular MDPmap product series. It is a compact bench top contactless electrical characterization tool for offline production control or R&D, measuring the surface photovoltage (SPV) of a sample over a wide injection range in steady state or short pulse excitation. Automated sample recognition and parameter setup allows an easy adaption to a large variety of different samples comprising epitaxial layers and wafers after various processing steps ranging from as-grown material to finished devices.

The major advantage of HR-SPS with fixed energy excitation sources is its high flexibility, which for example enables the integration of up to four lasers in the measurement head, either for injection level dependent SPV measurements ranging from very low to high injection or extracting depth information by using different laser wavelengths. Bias light facility is included as well. A customer defined calculation with different maps is possible as well as an export of primary data for further evaluation. For standard metrology tasks a predefined recipe enables routine measurements by only pushing one button.

Technical specifications

sample size	powder samples up to 300 mm diameter
excitation	select up to four different wavelengths from 337 nm up to 1550 nm (default 980 nm)
material	any photoactive material (contact us for consultation on your material)
measurables	time-resolved surface photovoltage measurements
dimensions	680 x 380 x 450 mm, weight: app. 65 kg
power	100–250 V, 50/60 Hz, 5 A
resolution	100 µm